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Aluminum nitride ceramic for electrostatic chuck
Keyword: Aluminum nitride ceramic for electrostatic chuck
Description
1.Material:Aluminum Nitride.
2.Function:Insulation and heat dissipation ceramic.
3.Type:Ceramic.
4.Color:Gray.
5.Can be customed:yes,please provide drawings for specific products.
Product Details:
Aluminum nitride ceramic for electrostatic chuck
Product Description:
The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer.Aluminum nitride ceramic have high thermal conductivity and Insulation properties which can be ESC material.
Our Aluminum Nitride substrates (AlN) are available in various sizes and thicknesses. Thanks to a large and live inventory, we can ship your part fast for you to start your project.
Our Service：
Please contact us for customization. We can also supply Aluminum Nitride (AlN) Ceramic with thermal conductivity up to 230W/mK
Specification：
| Dimension (LxW) |
φ170mm etc. |
|
Thickness |
10 mm etc. |
|
Thermal Conductivity |
170W/m.K |
|
Dielectric Constant |
8-9 (MHz) |
|
Bulk Density |
3.3 g/cm3 |
|
Surface Roughness |
Ra ≤6 μm on both sides |
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